Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent
1992-08-13
1993-12-28
Yuen, Henry C.
Heating
Work feeding, agitating, discharging or conveying...
Removable furnace bottom section or kiln cart
432 11, 432 24, F27D 312
Patent
active
052734242
ABSTRACT:
A vertical heat treatment apparatus has a reaction furnace, gas-introducing mechanism, a gas-exhausting mechanism, and temperature-sensing means. The reaction furnace is made up of a reaction tube and a heating mechanism. The reaction tube contains a plurality of objects which are to be treated and which are arranged at predetermined intervals. The heating mechanism is arranged outside of the reaction tube. The gas-introducing means introduces a gas into the reaction tube, and the gas-exhausting mechanism exhausts the gas from the reaction tube. The temperature-sensing mechanism includes a guide pipe which passes through the side wall of the reaction tube and which extends along the inner wall of the reaction tube in the longitudinal direction of the reaction tube. One end of the guide pipe is closed and is located inside the reaction tube, while the other end thereof is open and is located outside of the reaction tube. A bendable temperature-measuring device is inserted in the guide pipe. With this structure, the vertical heat treatment apparatus can perform treatment while simultaneously measuring the temperature in the interior of the reaction tube.
REFERENCES:
patent: 4243441 (1981-01-01), Wilson
patent: 4678432 (1987-07-01), Teraoka
patent: 4688180 (1987-08-01), Motomiya
Tokyo Electron Sagami Limited
Yuen Henry C.
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