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MEMS sensor structure and microfabrication process therefor

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Meso-microelectromechanical system having a glass beam and...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Metal alloy 42 liquid level control/aperture plate for...

Etching a substrate: processes – Forming or treating thermal ink jet article
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Metal alloy elements in micromachined devices

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Metal bridging monitor for etch and CMP endpoint detection

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Metal coated optical fiber techniques

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
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Metal mask etching of silicon

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains inorganic material
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Metal oxide pattern forming method

Etching a substrate: processes – Forming pattern using lift off technique
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Metal pattern and process for producing the same

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
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Metal plate processing method, lead frame processing method, lea

Etching a substrate: processes – Forming or treating josephson junction article
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Metal substrate for a magnetic disc and manufacture thereof

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Resist material applied in particulate form or spray
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Metal-polishing liquid and chemical mechanical polishing...

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
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Metal-polishing liquid and polishing method

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
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Metal/ceramic bonding article and method for producing same

Etching a substrate: processes – Forming or treating electrical conductor article
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Metal/ceramic bonding article and method for producing same

Etching a substrate: processes – Forming or treating electrical conductor article
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Metal/ceramic circuit board and method for producing same

Etching a substrate: processes – Forming or treating electrical conductor article
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Metalization structure and manufacturing method thereof

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
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Metallic building element for optoelectronics

Etching a substrate: processes – Forming or treating optical article
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Metallic implant and process for treating a metallic implant

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
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Metallic precipitate monitoring method

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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