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Planarization method using anisotropic wet etching

Etching a substrate: processes – Nongaseous phase etching of substrate – Substrate is multilayered
Reexamination Certificate

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Planarization of air bearing slider surfaces for reactive ion et

Etching a substrate: processes – Adhesive or autogenous bonding of two or more... – Removing at least one of the self-sustaining preforms or a...
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Planarization process and apparatus for the etch definition of m

Etching a substrate: processes – Forming or treating article containing magnetically...
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Planarization with reduced dishing

Etching a substrate: processes – Nongaseous phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Planarization with reduced dishing

Etching a substrate: processes – Planarizing a nonplanar surface
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Planarizing machines and methods for mechanical and/or...

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
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Planarizing method

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
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Planarizing method for fabricating an inductive magnetic write h

Etching a substrate: processes – Planarizing a nonplanar surface
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Plasma addressed liquid crystal display with etched plasma chann

Etching a substrate: processes – Forming or treating optical article
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Plasma addressed liquid crystal display with glass spacers

Etching a substrate: processes – Forming or treating article containing a liquid crystal...
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Plasma assisted chemical transport method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Plasma cleaning of a CVD or etch reactor using helium for plasma

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Plasma CVD apparatus and processes

Etching a substrate: processes – Etching and coating occur in the same processing chamber
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Plasma descaling of metals

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Plasma descaling of titanium and titanium alloys

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Plasma display panel and method of fabricating the same

Etching a substrate: processes – Forming or treating optical article
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Plasma enchanced chemical method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Plasma energy control by inducing plasma instability

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Plasma enhanced CVD apparatus and process, and dry etching appar

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Plasma etch apparatus with heated scavenging surfaces

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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