Planarization of air bearing slider surfaces for reactive ion et

Details Planarization of air bearing slider surfaces for reactive ion et Planarization of air bearing slider surfaces for reactive ion et

1995-03-27

1996-05-14

Valentine, Donald R.

Etching a substrate: processes

Adhesive or autogenous bonding of two or more...

Removing at least one of the self-sustaining preforms or a...

216 48, 216 52, 216 66, 216 38, C03C 2700, C03C 2506, H01L 21306

Patent

active

055164307

ABSTRACT:
A process for reactive ion etching or ion milling of an air bearing slider comprises the steps of mechanical alignment of unetched slider rows with active transducer devices onto an alignment fixture; positioning a layer of thermally conductive adhesive between the rows and a substrate; heating the adhesive through the substrate such that the adhesive bonds the rows to the substrate while encapsulating the rows; removing the alignment fixture; patterning and etching the exposed planarized slider surfaces; stripping the resist and cutting the rows into individual sliders while still bonded to the substrate; stripping the adhesive with an organic solvent. This process increases tolerance to manufacturing variability, minimizes damage and contamination of the transducer devices, and decreases the cycle time and production costs.

REFERENCES:
patent: 4564585 (1986-01-01), Blaske et al.
patent: 5156704 (1992-10-01), Kemp

Affiliated with

Also associated with

Rating

Planarization of air bearing slider surfaces for reactive ion et does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Planarization of air bearing slider surfaces for reactive ion et, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Planarization of air bearing slider surfaces for reactive ion et will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1893589