Planarization process and apparatus for the etch definition of m

Details Planarization process and apparatus for the etch definition of m Planarization process and apparatus for the etch definition of m

1997-09-04

2000-08-22

Stinson, Frankie L.

Etching a substrate: processes

Forming or treating article containing magnetically...

2960307, 216 33, 216 38, B44C 122

Patent

active

061067369

ABSTRACT:
A method of processing an assembly to prepare the assembly for etch patterning, the assembly including a row or bar mounted on a substrate, the row or bar bordered by a recess, the method including placing the assembly within a frame; applying a contiguous adhesive film across said assembly and said frame; depositing a fluid in said frame, said fluid forming in said recess; and removing said contiguous adhesive film.

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