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Sputtered spring films with low stress anisotropy

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Stabilized nitric acid compositions

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
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Stabilizing composition for inorganic peroxide solutions

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
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Staggered torsional electrostatic combdrive and method of...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Stamp for a lithographic process

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Stamp for micro/nano imprint lithography using diamond-like...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Stamp for use in a lithographic process, method of...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Stamper, lithographic method of using the stamper and method...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
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Stamper, lithographic method of using the stamper and method...

Etching a substrate: processes – Forming or treating an article whose final configuration has...
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Step and flash imprint lithography

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
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Step and flash imprint lithography

Etching a substrate: processes – Mechanically shaping – deforming – or abrading of substrate
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Stepped etalon

Etching a substrate: processes – Forming or treating optical article
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Stopper manufacturing method of a silicon micromachining structu

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Storage poly process without carbon contamination

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Stripping method for photoresist used as mask in Ch.sub.4 /H.sub

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Structual sub-assembly

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
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Structural modification using electron beam activated...

Etching a substrate: processes – Gas phase etching of substrate
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Structure and method including dry etching techniques for formin

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Structure and method to compensate for thermal edge loss in...

Etching a substrate: processes – Forming or treating electrical conductor article
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Structure formed with template having nanoscale features

Etching a substrate: processes – Forming groove or hole in a substrate which is subsequently...
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