Structure formed with template having nanoscale features

Details Structure formed with template having nanoscale features Structure formed with template having nanoscale features

2004-03-23

2009-10-06

Tran, Binh X (Department: 1792)

Etching a substrate: processes

Forming groove or hole in a substrate which is subsequently...

C216S040000, C216S048000, C216S054000

Reexamination Certificate

active

07597814

ABSTRACT:
A structure is provided that is formed with a template defining a pattern having nanoscale features. The template may be positioned on a substrate and include a resist layer having openings formed therein, where the template is configured to accommodate the controlled assembly of nanoscale objects.

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