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Process used in an RF coupled plasma reactor

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Process vessel

Etching a substrate: processes – Nongaseous phase etching of substrate
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Processes and apparatuses for producing porous materials

Etching a substrate: processes – Etching to produce porous or perforated article
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Processes and materials for step and flash imprint lithography

Etching a substrate: processes – Pattern or design applied by transfer
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Processes and materials for step and flash imprint lithography

Etching a substrate: processes – Pattern or design applied by transfer
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Processes for fabricating device layers with ultrafine features

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is exposed to nonimaging radiation
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Processing apparatus

Etching a substrate: processes – Nongaseous phase etching of substrate – Substrate is multilayered
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Processing apparatus and method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
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Processing low dielectric constant materials for high speed elec

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Processing method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
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Processing method for a metal surface

Etching a substrate: processes – Forming or treating cylindrical or tubular article having... – Forming or treating an embossing cylinder or tubular article
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Processing method for conservation of processing gases

Etching a substrate: processes – Gas phase etching of substrate
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Processing method for glass substrate, processed glass...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Processing method for glass substrate, processed glass...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Processing system and method for chemically treating a TERA...

Etching a substrate: processes – Etching and coating occur in the same processing chamber
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Production method for implanted hair articles comprising superfi

Etching a substrate: processes – Forming or treating fibrous article or fiber reinforced...
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Production of clean, well-ordered CdTe surfaces using laser abla

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Production of partially metallised grating structures

Etching a substrate: processes – Forming or treating optical article
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Profiled multi-component fiber flow plate method

Etching a substrate: processes – Etching to produce porous or perforated article
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Promotion of the adhesion of fluorocarbon films

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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