Etching a substrate: processes – Etching and coating occur in the same processing chamber
Reexamination Certificate
2006-08-29
2006-08-29
Ahmed, Shamim (Department: 1765)
Etching a substrate: processes
Etching and coating occur in the same processing chamber
C216S002000, C216S041000, C216S058000, C216S067000, C216S069000, C438S694000, C438S710000
Reexamination Certificate
active
07097779
ABSTRACT:
A processing system and method for chemically treating a TERA layer on a substrate. The chemical treatment of the substrate chemically alters exposed surfaces on the substrate. In one embodiment, the system for processing a TERA layer includes a plasma-enhanced chemical vapor deposition (PECVD) system for depositing the TERA layer on the substrate, an etching system for creating features in the TERA layer, and a processing subsystem for reducing the size of the features in the TERA layer.
REFERENCES:
patent: 5240556 (1993-08-01), Ishikawa et al.
patent: 6013574 (2000-01-01), Hause et al.
patent: 6316167 (2001-11-01), Angelopoulos et al.
patent: 6573030 (2003-06-01), Fairbairn et al.
patent: 6750127 (2004-06-01), Chang et al.
patent: 2004/0038537 (2004-02-01), Liu et al.
patent: 2004/0087092 (2004-05-01), Huang et al.
patent: 2005/0106888 (2005-05-01), Chiu et al.
patent: 102 23 954 (2003-12-01), None
patent: 07-283216 (1995-10-01), None
patent: WO 03/007344 (2003-01-01), None
patent: WO 03/007357 (2003-01-01), None
Matthew Sendelbach et al., “Feedforward of mask open measurements on an integrated scatterometer to improve gate linewidth control”, Proceedings of the SPIE, SPIE (Bellingham, WA), vol. 5375, pp. 686-702, (May 24, 2004).
Mosden Aelan
Yamashita Asao
Ahmed Shamim
Pillsbury Winthrop Shaw & Pittman LLP
Tokyo Electron Limited
LandOfFree
Processing system and method for chemically treating a TERA... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Processing system and method for chemically treating a TERA..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Processing system and method for chemically treating a TERA... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3641568