LandOfFree - US Patents - Listing for Etching a substrate: processes,Gas phase etching of substrate

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Vacuum treatment apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Patent

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Vapor selective etching method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Etching vapor produced by evaporation – boiling – or sublimation

Patent

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Vapor-phase processing method and apparatus therefor

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Reexamination Certificate

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VD process and apparatus for producing stand-alone thin films

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...

Reexamination Certificate

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Wafer bevel polymer removal

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Reexamination Certificate

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Wafer conductive structure for preventing plasma damage

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Reexamination Certificate

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Wafer etching method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Reexamination Certificate

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Wafer stage including electrostatic chuck and method for...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Reexamination Certificate

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Waferless clean process of a dry etcher

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Reexamination Certificate

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Work surface treatment method and work surface treatment apparat

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Patent

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