Plasma uniformity control for an inductive plasma source
Plasma-etching method and apparatus therefor
Plasma-inert cover and plasma cleaning process
Polysilicon/polycide etch process for sub-micron gate stacks
Post exposure resist bake
Post exposure resist bake
Precision dielectric etch using hexafluorobutadiene
Preparation and coating of composite surfaces
Process for ashing organic materials from substrates
Process for ashing organic materials from substrates
Process for etching oxide using a hexafluorobutadiene and...
Process for etching oxides in an electromagnetically coupled pla
Process for etching silicon-containing material on substrates
Process for polishing glass substrate
Process for pretreating surfaces of plastic items
Process for reducing copper oxide during integrated circuit fabr
Process for reducing particle formation during etching
Process for sterilization using an atmospheric pressure glow...
Process for surface-finishing inner surfaces of hollow bodies an
Process for treating solid surface and substrate surface