Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent
1998-06-23
2000-10-10
Stinson, Frankie L.
Etching a substrate: processes
Gas phase etching of substrate
Application of energy to the gaseous etchant or to the...
1566371, 118723ER, C03C 1500
Patent
active
061298565
ABSTRACT:
In a process for surface-finishing inner surfaces of hollow bodies with at east one opening the hollow body is finished from inside by means of a hollow-cathode glow discharge as the excitation source.
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Hellmich Anke
Jung Thomas
Fraunhofer-Gesellschaft zur Forderung der ange-wandten Forschung
Stinson Frankie L.
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