Process for surface-finishing inner surfaces of hollow bodies an

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

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1566371, 118723ER, C03C 1500

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061298565

ABSTRACT:
In a process for surface-finishing inner surfaces of hollow bodies with at east one opening the hollow body is finished from inside by means of a hollow-cathode glow discharge as the excitation source.

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patent: 4450787 (1984-05-01), Weakliem et al.
patent: 4713259 (1987-12-01), Gartner et al.
patent: 5800880 (1998-09-01), Laurent
patent: 5972436 (1999-10-01), Walther

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