Monopolar electrostatic chuck having an electrode in contact wit
Multi-electrode electrostatic chuck
Multi-electrode electrostatic chuck having fuses in hollow cavit
Multi-layer ceramic electrostatic chuck with integrated channel
Multi-zone electrostatic chuck and chucking method
Multielectrode electrostatic chuck with fuses
Multilayered electrostatic chuck and method of manufacture there
Multilayered electrostatic chuck and method of manufacture there
Multiple pole electrostatic chuck with self healing mechanism fo
Nanoscale grasping device, method for fabricating the same,...
Negative offset bipolar electrostatic chucks
Offset phase operation on a multiphase AC electrostatic clamp
Oven and improved energy transfer apparatus
Overdrive structures for flexible electrostatic switch
Overlay correction by reducing wafer slipping after alignment
Particle trap
Particle trap for electrostatic chuck
Particle trap for electrostatic chuck
Pedestal assembly with enhanced thermal conductivity
Perimeter seal for backside cooling of substrates