Offset phase operation on a multiphase AC electrostatic clamp

Details Offset phase operation on a multiphase AC electrostatic clamp Offset phase operation on a multiphase AC electrostatic clamp

2008-06-10

2008-06-10

Sherry, Michael J (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

Reexamination Certificate

active

07385799

ABSTRACT:
A method for clamping a workpiece is provided, wherein a workpiece is placed on a surface of a clamping plate of a multi-polar electrostatic clamp having a plurality of electrodes. A plurality of phases of the AC clamping voltage are applied to the plurality of electrodes, wherein at least one of the plurality of phases of the AC clamping voltage applied to at least one of the plurality of electrodes is shifted with respect to the remaining plurality of phases by an offset phase shift. A fluctuation in clamping force between the clamping plate and the workpiece during a cycle of the at least one of the plurality of phases of AC clamping voltage is determined, and the offset phase shift is controlled, based, at least in part, on the determined fluctuation in clamping force, an RC time constant of the clamping system, and a set of performance criteria.

REFERENCES:
patent: 5452177 (1995-09-01), Frutiger
patent: 5684669 (1997-11-01), Collins et al.
patent: 6307728 (2001-10-01), Leeser
patent: 6388861 (2002-05-01), Frutiger
patent: 6625003 (2003-09-01), Loo et al.
patent: 7209339 (2007-04-01), Kitabayashi et al.

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