Multilayered electrostatic chuck and method of manufacture there

Details Multilayered electrostatic chuck and method of manufacture there Multilayered electrostatic chuck and method of manufacture there

1995-03-10

1997-09-23

Fleming, Fritz

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

H02N 1300

Patent

active

056711166

ABSTRACT:
A ceramic electrostatic chucking device having electrostatic clamping electrodes suitable for clamping wafers and flat panel displays. The chucking device includes a top insulating layer, the clamping electrode, a second insulating layer, a first metallization layer for distributing power to one of the clamping electrodes, a third insulating layer, a second metallization layer for distributing power to the other clamping electrode, a fourth insulation layer, inner and outer heater electrodes, a fifth insulating layer, a third metallization layer for distributing power to the heater electrodes, and at least one additional insulating layer. The insulating layers include groups of electrically conductive feedthroughs for interconnecting the electrodes and metallization layers.

REFERENCES:
patent: 3518756 (1970-07-01), Bennett et al.
patent: 3838204 (1974-09-01), Ahn et al.
patent: 3993509 (1976-11-01), McGinty
patent: 4080414 (1978-03-01), Anderson et al.
patent: 4184188 (1980-01-01), Briglia
patent: 4234367 (1980-11-01), Herron et al.
patent: 4384918 (1983-05-01), Abe
patent: 4430365 (1984-02-01), Schaible et al.
patent: 4431473 (1984-02-01), Okano et al.
patent: 4464223 (1984-08-01), Gorin
patent: 4502094 (1985-02-01), Lewin et al.
patent: 4554611 (1985-11-01), Lewin
patent: 4579618 (1986-04-01), Celestino et al.
patent: 4645218 (1987-02-01), Ooshio et al.
patent: 4665463 (1987-05-01), Ward et al.
patent: 4677254 (1987-06-01), Boss et al.
patent: 4692836 (1987-09-01), Suzuki
patent: 4724510 (1988-02-01), Wicker et al.
patent: 4799983 (1989-01-01), Desai
patent: 4842683 (1989-06-01), Cheng et al.
patent: 4897171 (1990-01-01), Ohmi
patent: 4962441 (1990-10-01), Collins
patent: 4983254 (1991-01-01), Fujimura et al.
patent: 5004640 (1991-04-01), Nakatani et al.
patent: 5055964 (1991-10-01), Logan et al.
patent: 5103367 (1992-04-01), Horwitz et al.
patent: 5104834 (1992-04-01), Watanabe et al.
patent: 5110438 (1992-05-01), Ohmi et al.
patent: 5117121 (1992-05-01), Watanabe et al.
patent: 5151845 (1992-09-01), Watanabe et al.
patent: 5155652 (1992-10-01), Logan et al.
patent: 5160152 (1992-11-01), Toraguchi et al.
patent: 5179498 (1993-01-01), Hongoh et al.
patent: 5191506 (1993-03-01), Logan et al.
patent: 5207437 (1993-05-01), Barnes et al.
patent: 5326725 (1994-07-01), Sherstinsky et al.
patent: 5331134 (1994-07-01), Kimura
patent: 5350479 (1994-09-01), Collins et al.
patent: 5436790 (1995-07-01), Blake et al.
patent: 5463525 (1995-10-01), Barnes et al.

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