Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate
2008-01-08
2008-01-08
Leja, Ronald W. (Department: 2836)
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
Reexamination Certificate
active
11119316
ABSTRACT:
Wafer supporting apparatus, including an electrostatic chuck for supporting the wafer. The apparatus further includes an electrostatic shield which is positioned in proximity to the chuck and the wafer, and a voltage source which is coupled to apply an electric field between the chuck and the wafer. The voltage source applies one or more potentials to the electrostatic shield so as to prevent penetration of particles to the wafer.
REFERENCES:
patent: 6169652 (2001-01-01), Klebanoff
patent: 6380546 (2002-04-01), Petrov et al.
patent: 6451176 (2002-09-01), Vernon et al.
patent: 6534775 (2003-03-01), Harrington et al.
patent: 6674075 (2004-01-01), Petrov et al.
patent: 6689930 (2004-02-01), Pang et al.
patent: 6825475 (2004-11-01), Petrov et al.
Ben-Dayan Igal
Eitan Guy
Kidron Eitan
Krivts (Krayvitz) Igor
Petrov Igor
Applied Materials Israel, Ltd.
Fahmi Tarek N.
Leja Ronald W.
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