Integrated power modules for plasma processing systems
Integrated power modules for plasma processing systems
Isolated electrostatic chuck and excitation method
Isolated electrostatic wafer blade clamp
Joint structure of ceramics and metal and intermediate...
Layered ceramic/metallic assembly, and an electrostatic...
Light exposure apparatus
Low voltage electrostatic clamp for substrates such as dielectri
Machine and method for poling films of pyroelectric and piezoele
Machine and method for poling films of pyroelectric and piezoele
Machine unit having retaining device using static electricity
Mask apparatus for fine-line lithography
Mask holding device and method for holding mask
Membrane electrostatic chuck
MEMS based multi-polar electrostatic chuck
MEMS digital-to-acoustic transducer with error cancellation
MEMS digital-to-acoustic transducer with error cancellation
Method and an apparatus for offsetting plasma bias voltage in bi
Method and apparatus for balancing an electrostatic force produc
Method and apparatus for balancing an electrostatic force produc