Membrane electrostatic chuck

Details Membrane electrostatic chuck Membrane electrostatic chuck

1995-05-03

1996-07-02

Fleming, Fritz M.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

H02N 1300

Patent

active

055329039

ABSTRACT:
An electrostatic chuck for high vacuum operations and the like includes a membrane that allows conformal, full surface, electrostatic clamping to prevent substrate slippage and in-plane distortion. Because clamping of the substrate is performed with an electrostatic membrane chuck, the membrane is permitted to conform to the clamping surface of non-planar substrates. Thus, the substrate can be firmly held electrostatically without causing in-plane distortion.

REFERENCES:
patent: 3974382 (1976-08-01), Bernacki
patent: 4610020 (1986-09-01), La Fiandra
patent: 5275683 (1994-01-01), Arami et al.
patent: 5382311 (1995-01-01), Ishikawa et al.
Kendall. "Double-Sided Electrostatic Chunk" IBM Technical Disclosure Bulletin vol. 32 No. 5B Oct. 1989.

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