Isolated electrostatic chuck and excitation method

Details Isolated electrostatic chuck and excitation method Isolated electrostatic chuck and excitation method

1992-01-21

1994-05-24

Pellinen, A. D.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

361233, 361235, H02N 1300

Patent

active

053154738

ABSTRACT:
An electrostatic clamp or chuck and method uses soft square wave, slew rate limited, A.C. clamping voltages and a balanced, differential drive for clamping flat articles such as semiconductor wafers to pedestals, wafer transfer blades, and the like, with a large ratio of clamping force to clamping voltage, reduced decay of the clamping force and associated nearly constant maximum clamping force, instantaneous elimination of remnant clamping force when the clamping voltage is removed (instant off operation), isolation of the clamped article from the clamping voltage, and substantial elimination of vibration. Preferably the A.C. frequency is 0.1 to 60 Hz. The instant off operation is enhanced by increasing the frequency as the clamping voltage is decreased.

REFERENCES:
patent: 3733632 (1988-08-01), Ohmi et al.
patent: 4184188 (1980-01-01), Briglia
patent: 4554611 (1985-11-01), Lewin
patent: 4665463 (1987-05-01), Ward et al.
patent: 4724510 (1988-01-01), Wicker et al.
patent: 4962441 (1990-09-01), Collins
patent: 5103367 (1992-04-01), Horwitz et al.
patent: 5117121 (1992-09-01), Watanabe et al.
patent: 5173834 (1992-12-01), Sogoh
IBM Technical Disclosure Bulletin, vol. 31 No. 1 Jun. 1988.

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