Light exposure apparatus

Details Light exposure apparatus Light exposure apparatus

2005-12-07

2009-10-20

Jackson, Stephen W (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

Reexamination Certificate

active

07606020

ABSTRACT:
A light exposure apparatus includes a chuck adapted to receive a substrate on a surface thereof, a plurality of first lift pins in the chuck that are able to move up and down to load/unload the substrate on/from the chuck, and a plurality of second lift pins in the chuck to discharge electrostatic charges of the chuck and the substrate.

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patent: 2003/0128308 (2003-07-01), Kim
patent: 2004/0196616 (2004-10-01), Koo et al.
patent: 09-148419 (1997-06-01), None
patent: 2000-236014 (2000-08-01), None
patent: 2003-347395 (2003-12-01), None

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