Microwave plasma generator and system for decomposing...

Microwave plasma generator with the short cross-sectional...

Microwave plasma generator, method of decomposing organic...

Microwave plasma ion source

Microwave plasma operation using a high power microwave transmis

Microwave plasma processing apparatus

Microwave plasma source apparatus

Microwave reactive gas discharge device

Microwave stripline applicators

Miniature pulsed vacuum arc plasma gun and apparatus for thin-fi

Modular low aspect ratio-high beta torsatron

Modular segmented cathode plasma generator

Modular uniform gas distribution system in an ion source

Monolithic miniaturized inductively coupled plasma source

MPD Intense beam pulser

Multi chamber plasma process system

Multi-beam, multi-aperture ion sources of the beam-plasma type

Multi-cathode metal vapor arc ion source

Multi-electrode plasma source

Multi-function charged particle apparatus