Multi-cathode metal vapor arc ion source

Details Multi-cathode metal vapor arc ion source Multi-cathode metal vapor arc ion source

1987-03-13

1988-11-15

Moore, David K.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

31511191, 31511161, 31511151, 313237, 31323161, 313147, H01J 2904

Patent

active

047852208

ABSTRACT:
An ion generating apparatus utilizing a vacuum chamber, a cathode and an anode in the chamber. A source of electrical power produces an arc or discharge between the cathode and anode. The arc is sufficient to vaporize a portion of the cathode to form a plasma. The plasma is directed to an extractor which separates the electrons from the plasma, and accelerates the ions to produce an ion beam. One embodiment of the appaatus utilizes a multi-cathode arrangement for interaction with the anode.

REFERENCES:
patent: 2677061 (1954-04-01), Wilson
patent: 3096435 (1963-07-01), Burdy
patent: 3512030 (1970-05-01), Levy
patent: 3562575 (1971-02-01), Paine
patent: 3955118 (1976-05-01), Flemming
patent: 4496881 (1985-01-01), Cheeve
patent: 4570106 (1986-02-01), Sohval et al.

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