Parallel plate electron multiplier with ion feedback...
Parallel scan type ion implanter
Particle accelerator
Particle accelerator employing transient space charge potentials
Particle controller
Particle source for a reactive ion beam etching or plasma deposi
Particle source for producing excited particles
Particle source, especially for reactive ionic etching and plasm
Particulate collector apparatus and method for ion generators
Penning discharge ion source with self-cleaning aperture
Phase and frequency control of a radio frequency generator...
Planar crossed-field plasma switch and method
Planar gas introducing unit of a CCP reactor
Plasma accelarator arrangement
Plasma accelerating apparatus and plasma processing system...
Plasma accelerator with closed electron drift
Plasma accelerator with closed electron drift
Plasma accelerator with closed electron drift
Plasma accelerator with closed electron drift and conductive ins
Plasma apparatus