4. Electric lamp and discharge devices: systems
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Wafer area pressure control

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Wafer area pressure control for plasma confinement

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Wafer holding apparatus for ion implantation

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Patent

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Waveguide and microwave ion source equipped with the waveguide

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Reexamination Certificate

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Wide area source of multiply ionized atomic or molecular species

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Patent

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Wide area VUV lamp with grids and purging jets

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Patent

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Wire ion plasma gun

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Patent

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Wire-ion-plasma electron gun employing auxiliary grid

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Patent

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