Closed electron drift hall effect plasma accelerator with all ma

Cluster tool soft etch module and ECR plasma generator therefor

Coaxial cavity type, radiofrequency wave, plasma generating appa

Coaxial electromagnetic wave injection and electron cyclotron re

Coaxial resonator microwave plasma generator

Coaxial type impedance matching device and impedance...

Coaxial type impedance matching device and impedance...

Cold cathode ion beam deposition apparatus with segregated...

Cold cathode ion beam deposition apparatus with segregated...

Cold electron plasma reactive ion etching using a rotating elect

Cold-cathode ion source

Cold-cathode ion source with a controlled position of ion beam

Cold-cathode ion source with propagation of ions in the electron

Cold-cathode, ion-generating and ion-accelerating universal devi

Compact plasma accelerator

Compact plug connectable ion source

Concentric rings with different RF energies applied thereto

Conjugated ICP and ECR plasma sources for wide ribbon ion...

Constricted glow discharge plasma source

Constricted glow discharge plasma source