Cold-cathode, ion-generating and ion-accelerating universal devi

Details Cold-cathode, ion-generating and ion-accelerating universal devi Cold-cathode, ion-generating and ion-accelerating universal devi

1990-01-11

1992-07-14

LaRoche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

31511121, 31511131, 31511141, 31323131, 250423R, H01J 130, H01J 2702

Patent

active

051306077

ABSTRACT:
The device comprises an ionizing unit for the production of low-energy (100-1000 eV) ions (FIG. 2a) with a second negative medium voltage (-100 to -1000 V) grid (6') cathode (6), a second also grid (13') and low-voltage (0 to +100 V) anode (13) and a third medium voltage (-100 to -1000 V) accelerating cathode (12, 12'), to extract the ions from the unit of three grids (6', 13',12'). For the production of high-energy (from 10 to beyond 200 keV) ions (FIG. 3a) there are provided in succession starting from target (2): a first low-voltage (0 to +100 V) anode (7', 7"), a second low-voltage (0 to +50 V) grid (13.sup.IV) anode (13), the second anode which cooperates to form with its central opening (13") an acceleration lens of the ion beam, a second medium negative voltage (-500 to -3000 V) grid (6") accelerating cathode (6) and a third accelerating cathode (12, 12") which, with its central opening 12", completes the acceleration lenses, the entire unit being arranged so as to direct the ion beam toward the bottom or in the desired direction.

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