Compact plug connectable ion source

Details Compact plug connectable ion source Compact plug connectable ion source

1982-05-26

1984-05-01

Dixon, Harold

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

250426, 250423R, 313161, 31323141, 3133631, 31511101, 31511141, H01J 724

Patent

active

044464037

ABSTRACT:
A compact ion source plug connected to a socket is provided. The source uses a magnetic pole piece which includes a center pole piece and a surrounding circumferential pole piece to form an arcuate fringe field. Cathode elements and anode elements are located within the fringe field for producing a plasma. A source body terminates at one end with at least one grid and forms a plasma chamber with a base member. All of the electrical connections to the plasma generator and the gas connection are through a plug formed on the opposite side of the base member.

REFERENCES:
patent: 2975279 (1961-03-01), Craig
patent: 3115591 (1963-12-01), Brunnee
patent: 3408283 (1968-10-01), Chopra et al.
patent: 3742275 (1973-06-01), Gutow
patent: 3913320 (1975-10-01), Reader et al.

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