Cold-cathode ion source

Details Cold-cathode ion source Cold-cathode ion source

1975-02-19

1976-05-04

Demeo, Palmer C.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

313 36, 313217, 313240, 313360, 315116, H01J 130, H01J 304, H01J 340, H01J 724

Patent

active

039551180

ABSTRACT:
A cold-cathode ion source includes a specially shaped hollow anode and specially shaped anode-cathode insulators to preclude the buildup of short-circuiting bridges of sputtered cathode material. When used with solid feed material, the source can also include an oven-anode having cavities for vaporizing the solid feed material and passages connecting the cavities to the bore of the anode. The geometry of the oven-anode provides an increasing temperature gradient from the cavities to the bore that minimizes condensation of vaporized feed material that could block the ports.

REFERENCES:
patent: 2715692 (1955-08-01), Cardwell
patent: 2754442 (1956-07-01), Boutry et al.
patent: 2831996 (1958-04-01), Martina
patent: 3264511 (1966-08-01), Yamasaki
patent: 3546513 (1970-12-01), Henning
patent: 3623136 (1971-11-01), Tomita et al.
"A Review of PIG Sources for Multiply Charged Heavy Ions," by J. R. J. Bennett, IEEE Transactions on Nuclear Science, Vol. NS-19, pp. 48-68, Apr. 1972.

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