Concentric rings with different RF energies applied thereto

Details Concentric rings with different RF energies applied thereto Concentric rings with different RF energies applied thereto

1995-08-21

1997-06-10

Pascal, Robert

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511121, H01J 724

Patent

active

056379617

ABSTRACT:
A plasma generating apparatus comprises a chamber for containing an object to be treated, a pair of high frequency coils located concentric in the chamber and opposed to the object, to generate alternating magnetic fields for inducing alternating electric fields in the chamber, the alternating electric fields creating plasma used to treat the object, a high frequency power supply for generating a high frequency power, distribution means for distributing the high frequency power into a plurality of distributed powers at a predetermined distribution ratio, phase shifter means for shifting the phase of each of the distributed powers, and a matching box for supplying the high frequency coils with the distributed powers of phases set by the phase shifter means, respectively.

REFERENCES:
patent: 4795880 (1989-01-01), Hayes et al.
patent: 5194731 (1993-03-01), Turner
patent: 5285046 (1994-02-01), Hansz
patent: 5401350 (1995-03-01), Patrick et al.

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