Coaxial cavity type, radiofrequency wave, plasma generating appa

Details Coaxial cavity type, radiofrequency wave, plasma generating appa Coaxial cavity type, radiofrequency wave, plasma generating appa

1989-04-30

1990-03-06

Laroche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

315 39, 31511141, 3133621, 250423R, 118 501, 427 38, H01J 724, H05B 3126

Patent

active

049069004

ABSTRACT:
A coaxial radiofrequency wave plasma generating apparatus with an elongate metallic cavity (10) having a movable elongate coupling probe (16) mounted in line with an axis (a--a) of the cavity having a central coaxial conductor (11) and having a movable plate (12) for obtaining a mode of resonance of the radiofrequency wave in the cavity surrounding a chamber (14) for confining the plasma (100) is described. An end (11b) of the conductor is adjacent to the chamber and can optionally support a set of magnets (27). The apparatus is particularly useful for retrofitting existing vacumm sources (101) having small inlet ports (105) for plasma treatment using molecular beam epitaxy (MBE).

REFERENCES:
patent: 3757518 (1973-09-01), Bahr
patent: 3866414 (1975-02-01), Bahr
patent: 4058748 (1977-11-01), Sakudo et al.
patent: 4316090 (1982-03-01), Sakudo et al.
patent: 4393333 (1983-07-01), Sakudo et al.
patent: 4409520 (1983-10-01), Koike et al.
patent: 4507588 (1985-03-01), Asmussen et al.
patent: 4585668 (1986-04-01), Asmussen et al.
patent: 4630566 (1986-12-01), Asmussen et al.
patent: 4691662 (1987-09-01), Roppel et al.
patent: 4727293 (1988-02-01), Asmussen et al.
patent: 4777336 (1988-10-01), Asmussen et al.
patent: 4778561 (1988-10-01), Ghanbari
patent: 4792772 (1988-12-01), Asmussen
Rogers et al., "Standing Waves Along a Microwave Generated Surface Wave Plasma", IEEE Trans. on Plasama Science, vol. PS-10, No. 1, Mar. 1982, pp. 11-16.
R.M. Fredericks in "An Experimental & Theoretical Study of Resonantly Sustained Plasma in Microwave Cavities", PH.D. Thesis, M.S.U. (1972), pp. 30-45.
R. E. Fritz, "An Experimental Investigation of the Characteristics RF Surface Wave Generated Plasmas", M.S. Thesis, M.S.U. (1979) particularly pp. 30-38.
Fredericks et al., "Excitation of Warm Plasma . . . Short-Gap Cavity", Proc. IEEE, vol. 59, No. 2, p. 315, Feb. 1971.
Fredericks et al., "Returning and Hysteresis Effect . . . Microwave Cavity", J. Appl. Phys., vol. 42, No. 9, p. 647, Aug. 1971.

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