Thin film forming equipment and method
Thin film forming method
Thin film forming method
Titanium nitride thin film formation on metal substrate by...
Transmission line for providing power to an electrode boat in a
Tubular carbon nano/micro structures and method of making same
Use of carbon-based films in extending the lifetime of substrate
Vacuum processing apparatus and vacuum processing method
Vacuum processing method
Vacuum treatment system for homogeneous workpiece processing
Vapor phase deposition of hydrogen silsesquioxane resin in the p