Transmission line for providing power to an electrode boat in a

Details Transmission line for providing power to an electrode boat in a Transmission line for providing power to an electrode boat in a

1990-12-12

1992-12-29

Bueker, Richard

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

118723, 156345, C23C 1648

Patent

active

051750210

ABSTRACT:
A transmission line is constructed from ceramic and nickel materials to provide a characteristic impedance that matches the characteristic impedance of a boat assembly in a chemical vapor deposition system. The transmission line is interposed between a set of feedthroughs through the wall of a reactant tube and a set of contacts on the boat assembly. The transmission line improves the efficiency of the power transfer to the boat assembly from an RF power source external to the reactant tube. The transmission line is particularly advantageous at high frequencies such as, for example, 13.56 MHz. This improves the repeatability of the deposition of film on wafers in the boat assembly.

REFERENCES:
patent: 4223048 (1980-09-01), Engle
patent: 4610748 (1986-09-01), Engle et al.
patent: 4799451 (1989-01-01), Gardner

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