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CVD method for forming silicon nitride film

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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CVD method in vertical CVD apparatus using different...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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CVD method of forming self-lubricating composites

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CVD of Al.sub.2 O.sub.3 layers on cutting inserts

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CVD process of forming hydrogenated a-Si films

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CVD ruthenium seed for CVD ruthenium deposition

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CVD treatment of hard friction coated steam line plug grips

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Cyclical deposition of refractory metal silicon nitride

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Defect reduction in the growth of group III nitrides

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Deposition film orientation and reflectivity improvement using a

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Deposition method

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Deposition method and products

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Deposition methods for improved delivery of metastable species

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Deposition methods for improved delivery of metastable species

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Deposition methods for improved delivery of metastable species

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Deposition of borophosphosilicate glass

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Deposition of CVD layers for copper metallization using...

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Deposition of silicon dioxide and silicon oxynitride films using

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Deposition of silicon dioxide films at temperatures as low as 10

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Deposition of silicon nitride

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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