Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate
2008-07-01
2008-07-01
Chen, Bret (Department: 1792)
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
C427S255280, C427S562000, C117S084000
Reexamination Certificate
active
10852784
ABSTRACT:
A method of providing material into a deposition chamber is provided. A reservoir is in fluid communication with the deposition chamber. A metastable specie is provided and contained within the reservoir prior to flowing the metastable specie from the reservoir into the deposition chamber. For atomic layer deposition, the metastable specie can be purged from the containment reservoir and the metastable specie can be compressed into the reaction chamber from the reservoir. A portion of the metastable specie is deposited onto a substrate.
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Derderian Garo J.
Sandhu Gurtej S.
Chen Bret
Micro)n Technology, Inc.
Wells St. John P.S.
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