Defect reduction in the growth of group III nitrides

Details Defect reduction in the growth of group III nitrides Defect reduction in the growth of group III nitrides

1995-08-18

1997-07-22

Beck, S.

Coating processes

Coating by vapor, gas, or smoke

Mixture of vapors or gases utilized

4272557, C23C 1634

Patent

active

056501986

ABSTRACT:
The present invention relates to an improved method to produce Group III nitride thin film having a lower defect density, which method comprises:

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