Deposition methods for improved delivery of metastable species

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized

Reexamination Certificate

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C427S255280, C427S562000, C117S084000

Reexamination Certificate

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07393562

ABSTRACT:
A method of providing material into a deposition chamber is provided. A reservoir is in fluid communication with the deposition chamber. A metastable specie is provided and contained within the reservoir prior to flowing the metastable specie from the reservoir into the deposition chamber. For atomic layer deposition, the metastable specie can be purged from the containment reservoir and the metastable specie can be compressed into the reaction chamber from the reservoir. A portion of the metastable specie is deposited onto a substrate.

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