CVD method of forming self-lubricating composites

Details CVD method of forming self-lubricating composites CVD method of forming self-lubricating composites

1995-09-29

1998-12-01

King, Roy V.

Coating processes

Coating by vapor, gas, or smoke

Mixture of vapors or gases utilized

4272551, 427314, C23C 1600

Patent

active

058435336

ABSTRACT:
An article having a multiphase composite lubricant coating of a hard refractory matrix phase of titanium nitride dispersed with particles of a solid lubricating phase of molybdenum disulfide is prepared by heating the article to temperatures between 350.degree. and 850.degree. C. in a reaction vessel at a reduced pressure and passing a gaseous mixture of Ti((CH.sub.3).sub.2 N).sub.4, MoF.sub.6, H.sub.2 S and NH.sub.3 over the heated article forming a multiphase composite lubricant coating on the article.

REFERENCES:
patent: 4975340 (1990-12-01), Suhr et al.
patent: 5252518 (1993-10-01), Sandhu et al.
patent: 5282985 (1994-02-01), Zabinski et al.
Pierson, "Handbook of Chemical Vapor Deposition (CVD), Principles, Technology and Applications", Noyes Publications (1992) pp. 135, 136, 225, 252 and 356.

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