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Semiconductor processing system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Semiconductor processing system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Semiconductor processing system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Semiconductor processing system

Coating apparatus – Gas or vapor deposition
Patent

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Semiconductor producing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Semiconductor producing apparatus comprising wafer vacuum chucki

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Semiconductor producing apparatus, and wafer vacuum chucking dev

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Semiconductor substrate deposition processor chamber liner...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Semiconductor substrate processing chamber and accessory...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Semiconductor substrate processing chamber having...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Semiconductor substrate-supporting apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Semiconductor treatment apparatus

Coating apparatus – Gas or vapor deposition
Patent

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Semiconductor vacuum deposition system and method having a...

Coating apparatus – Gas or vapor deposition – Running length work
Reexamination Certificate

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Semiconductor wafer and vapor phase growth apparatus

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Semiconductor wafer carrier guide tracks

Coating apparatus – Gas or vapor deposition
Patent

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Semiconductor wafer holder with CVD silicon carbide film coating

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Semiconductor wafer holding assembly

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Semiconductor wafer process chamber with susceptor back coating

Coating apparatus – Gas or vapor deposition
Patent

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Semiconductor wafer process chamber with susceptor back coating

Coating apparatus – Gas or vapor deposition
Patent

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Semiconductor wafer process chamber with suspector back coating

Coating apparatus – Gas or vapor deposition – Work support
Patent

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