Absorptive filter for semiconductor processing systems

Actively cooled effusion cell for chemical vapor deposition

Actively-cooled distribution plate for reducing reactive gas...

Actively-cooled distribution plate for reducing reactive gas...

Adjusting DC bias voltage in plasma chamber

Air lock for introducing substrates to and/or removing them...

ALD apparatus and method

Alignment aid for an electrode plate assembly

Alignment of a shadow frame and large flat substrates on a heate

Alignment of a shadow frame and large flat substrates on a suppo

Antenna coil assemblies for substrate processing chambers

Anti-notch thinning heater

Apparatus and a method for forming an alloy layer over a...

Apparatus and concept for minimizing parasitic chemical...

Apparatus and improved polymerization gun for coating objects by

Apparatus and method for chemical vapor deposition of diamond

Apparatus and method for controlling oscillation output of magne

Apparatus and method for controlling plasma size and position in

Apparatus and method for depositing a film

Apparatus and method for depositing a substance with temperature