Coating apparatus – Gas or vapor deposition – With treating means
Patent
1997-04-15
2000-06-27
Breneman, R. Bruce
Coating apparatus
Gas or vapor deposition
With treating means
156345, C23C 1500
Patent
active
060793554
ABSTRACT:
An electrode plate assembly for installation to an etching console includes a cooling electrode plate, an aligning peg, a covering plate and a plurality of screws for coupling the electrode cooling plate and cover plate. The cooling electrode plate is formed of a metallic, disk-shaped electrode plate including an aligning peg securing hole, a plurality of first screw holes and a plurality of first vent holes. The aligning peg is located within the aligning peg securing hole and protrudes from the cooling electrode plate. The covering plate is a thin disk-shaped plate including an aligning peg receiving hole, a plurality of second screw holes and a plurality of second vent holes. Upon installation, the covering plate and the cooling electrode plate are coupled by a plurality of screws through the first and second screw holes, with the aligning peg received in the aligning peg receiving hole of the covering plate to assure proper alignment of the plates.
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patent: 5324411 (1994-06-01), Ichishima et al.
patent: 5556474 (1996-09-01), Otani et al.
patent: 5698035 (1997-12-01), Matsudo et al.
patent: 5846329 (1998-12-01), Hori et al.
Ho James
Lou Chang Ping
Breneman R. Bruce
United Microelectronics Corp.
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