Apparatus and improved polymerization gun for coating objects by

Details Apparatus and improved polymerization gun for coating objects by Apparatus and improved polymerization gun for coating objects by

1998-03-04

1999-10-26

Breneman, Bruce

Coating apparatus

Gas or vapor deposition

With treating means

118723ER, 20429805, H05H 100

Patent

active

059709081

ABSTRACT:
An apparatus for initial ion cleaning, vapor metal deposition and protective coating of objects by vacuum deposition. The apparatus includes a vacuum chamber for receiving the objects which are held on a movable rack or support. A metal such as aluminum is vaporized centrally in the chamber in a well known fashion after the chamber has been substantially evacuated of air molecules for uniform vapor deposition of the metal atop exposed surfaces of the objects. An improved polymerization gun includes an elongated housing having an arcuate or concaved surface which is connected to an external surface of the chamber over an elongated opening formed through a chamber side wall. The polymerization gun also includes an elongated conductive preferably aluminum rod disposed along the opening tangentially to the chamber surface and two apertured delivery tubes or members positioned within the housing. The conductive rod is electrically isolated from the housing and chamber and connected to a d.c. or a.c. high voltage power source as a cathode to produce plasma during ion cleaning and when applying the protective monomer coating. By positioning the two delivery tubes in close proximity to the conductive rod, both inert gas used for ion cleaning and a liquid monomer which is vaporized as it is drawn into the housing by chamber vacuum must each in proper sequence pass through the plasma before entering the chamber to enhance uniformity of cleaning, deposition and polymerization of the protective coating of the objects.

REFERENCES:
patent: 4479862 (1984-10-01), Swenson
patent: 4842893 (1989-06-01), Yializis et al.
patent: 5093153 (1992-03-01), Brochot et al.
patent: 5298290 (1994-03-01), Jost et al.
patent: 5408448 (1995-04-01), Carmen
patent: 5641559 (1997-06-01), Namiki
patent: 5656141 (1997-08-01), Betz et al.
Kashiwagi et al, Organic films containing metal prepared by plasma polymerization, J.Vac.Sci.&Tech.A 5(4), pp. 1828-1830, Jul. 1, 1987.
Felts et al, Commerical-scale application of plasma processing for polymeric substrates: From laboratory to production, J.Vac.Sci.&Tech.A 10(4), pp. 1675-1681, Jul. 1992.
Bruno et al, Study of the NF3 plasma cleaning of reactors for amorphous silicon deposition, J.Vac.Sci.&Tech.A 12(3), pp. 690-698, May 1994.
Halverson et al, Plasma assisted chemical vapor deposition on "three-dimensional" substrates, J.Vac.Sci.&Tech.A 10(3), pp. 439-443, May 1992.
Hamasaki et al, New mode of plasma deposition in a capacitive coupled reactor, App.Phy.Let. 44(11), pp. 1049-1051, Jun. 1, 1994.

Affiliated with

Also associated with

Rating

Apparatus and improved polymerization gun for coating objects by does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and improved polymerization gun for coating objects by, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and improved polymerization gun for coating objects by will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-752017