Inverted positive vertical flow chemical vapor deposition reacto

Ion beam coating apparatus

Isolation chamber arrangement for serial processing of...

Isolation of incompatible processes in a multi-station processin

Jet vapor deposition of organic molecule guest-inorganic host th

Laser sputtering apparatus

Laser-assisted chemical vapor deposition

Lens plasma coating system

Load lock chamber for vertical type heat treatment apparatus

Loading lock for chemical vapor deposition apparatus

Low pressure plasma processing apparatus and method

Low temperature integrated metallization process and apparatus

Low-pressure processing device

Magnetic recording media, magnetic recording media fabrication m

Magnetic roller gas gate employing transonic sweep gas flow to i

Magnetically coupled linear servo-drive mechanism

Manufacturing apparatus of semiconductor device having...

Massively parallel atomic layer deposition/chemical vapor...

Material handling system and methods for a multichamber...

Method and a system for sealing an epitaxial silicon layer...