Target and process for its production, and method of forming...
Target arrangement with a circular plate, magnetron for mounting
Target assemblies of special materials for use in sputter coatin
Target assembly capable of attaining a high step coverage ratio
Target assembly comprising, for use in a magnetron-type sputteri
Target assembly for ion beam sputter deposition with...
Target assembly for sputtering magnetic material
Target assembly for use in forming an overcoat in a magnetic rec
Target assembly having inner and outer targets
Target component for cathode sputtering
Target comprising thickness profiling for an RF magnetron
Target cooling and support for magnetron sputter coating apparat
Target cooling system with trough
Target electrode for preventing corrosion in electrochemical cel
Target fabrication method for cylindrical cathodes
Target for cathode sputtering
Target for cathode sputtering
Target for cathode sputtering and method of its production
Target for cathode sputtering apparatus
Target for cathodic sputtering and method for producing the targ