Apparatus and method forming thin film

Apparatus and methods for sputtering

Apparatus and process for increasing uniformity of sputtering ra

Apparatus and process for the deposition of a thin layer on a tr

Apparatus for and method of forming electrode for lithium...

Apparatus for coating a substrate with thin layers

Apparatus for DC reactive plasma vapor deposition of an...

Apparatus for depositing material into high aspect ratio holes

Apparatus for forming transparent conductive film by sputtering

Apparatus for plasma-enhanced physical vapor deposition of...

Apparatus for repairing a pattern film

Apparatus for sputter deposition

Apparatus for sputter deposition

Apparatus for sputter-coating glass and corresponding method

Apparatus for sputter-coating glass and corresponding method

Apparatus for sputtering ionized material in a medium to...

Apparatus for sputtering material onto a workpiece with the...

Apparatus for, and method of, depositing a film on a substrate

Apparatus for, and method of, depositing a film on a substrate

Apparatus, method and system for monitoring chamber...