Magnetron sputtering method and apparatus utilizing a pulsed ene
Magnetron sputtering method and sputtering target
Magnetron sputtering source and method of use thereof
Magnetron sputtering source and method of use thereof
Magnetron sputtering source for low pressure operation
Magnetron sputtering system and photomask blank production...
Magnetron sputtering systems including anodic gas...
Magnetron sputtering target for reduced contamination
Magnetron with controlled DC power
Magnetron with cooling system for substrate processing system
Magnetron with flux switching cathode and method of operation
Manufacture method of high coercivity FePt-Si3N4 granular...
Manufacturing method and apparatus of phase shift mask blank
Manufacturing method and apparatus of phase shift mask blank
Manufacturing method of magnetoresistive element and film...
Manufacturing method of samarium sulfide thin films
Manufacturing process for a magneto-resistive head...
Mask and method for making gradient sputtered coatings
Mask assembly having mask stress relieving feature
Mask blank manufacturing method and sputtering target for...