Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1999-02-24
2000-10-17
Diamond, Alan
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419215, 20419218, 20419225, 20419227, 20419228, 20429812, 20429813, C23C 1434
Patent
active
061325686
ABSTRACT:
The present invention provides a method for producing a samarium monosulfide piezochromic thin film, and the present invention relates to a process for producing a thin film material at a high film formation rate by forming a samarium monosulfide thin film on a substrate by a reactive sputtering deposition process, which is a process for producing a samarium monosulfide (SmS) thin film, characterized by co-sputtering a disamarium trisulfide (Sm.sub.2 S.sub.3) compound target and a samarium (Sm) metal target simultaneously in an inert gas discharge.
REFERENCES:
Jin et al., "Growth of Samarium Monosulfide Thin Films by Co-Sputtering Deposition," Journal of Crystal Growth, pp. 285-289 (month unknown), 1988.
Charles B. Greenberg, "Optically Switchable Thin Films: A Review", Thin Solid Films, 251 (1994), pp. 81-93., (Month Unknown).
M.R. Jacobson, et al., "Chemical Vapor Deposition of Samarium Chalcogenides: Progress on Fabricating Thin Film Phase Transition Materials", SPIE vol. 428 (1983), pp. 57-64, Month Unknown).
C. F. Hickey, et al., "Optical Response of Switching SmS in Thin Films Prepared by Reactive Vaporation", j. Appl. Phys. 62(9), Nov. 1, 1987, pp. 3912-3917.
Dieter W. Pohl, et al., "Laser Writing-Reading With SmS Thin Films", Applied Optics, vol. 14, No. 5, May 1975, pp. 1060-1061.
V. V. Kaminskii, et al., "Electrical Properties and Structure Characteristics of Polycrystalline Samarium Monosulfide Films", Sov. Phys. Solid State 33(1), Jan. 1991, pp. 108-111.
T. L. Bzhalava, et al., Sov. Phys. Solid State, vol. 16, No. 12, Jun. 1975, p. 2428.
C. F. Hickey, et al., "SmS Phase Transition in Thin Films Prepared by Reactive Evaporation", Phase Transitions, vol. 14, 1989, pp. 187-199, (Month Unknown).
S.V. Pogarev, et al., "Study of SmS Thin Films With Various Lattice Constants", Sov. Phys. Solid State 23(2), Feb. 1981, pp. 245-248.
M. N. Naboka, et al., "Formation and Structure of Thin Films of Samarium Sulfides", Inorg. Mater. vol. 16, No. 7, Jul. 1980, pp. 806-809.
T. L. Bzhalava, et al., "Metal Modification of SmS in Vacuum-Deposited Films", Physics Letters, vol. 55A, No. 3, Dec. 1, 1975, pp. 161-162.
P. Jin, et al., "Growth of Samarium Monosulfide Thin Films by Co-Sputtering Deposition", Journal of Crystal Growth 191 (1998), pp. 285-289, (Month Unknown).
Jin Ping
Tanemura Sakae
Diamond Alan
Japan as represented by Director General of Agency of Industrial
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