Anode structure for magnetron sputtering systems

Anode structure for magnetron sputtering systems

Antireflective film for photoelectric devices and manufacturing

Apparatus and method for a reliable return current path for...

Apparatus and method for achieving via step coverage symmetry

Apparatus and method for arc detection

Apparatus and method for controlling erosion profile in...

Apparatus and method for controlling plasma uniformity...

Apparatus and method for controlling plasma uniformity...

Apparatus and method for controlling processing uniformity in a

Apparatus and method for enhancing uniformity of a metal film fo

Apparatus and method for fabricating carbon thin film

Apparatus and method for fracture absorption layer

Apparatus and method for improving film uniformity in a...

Apparatus and method for improving target erosion in hollow...

Apparatus and method for in-situ generation of dangerous polyato

Apparatus and method for intra-layer modulation of the...

Apparatus and method for ion beam polishing and for in-situ elli

Apparatus and method for localized ion sputtering

Apparatus and method for magnetron-enhanced plasma-assisted chem