MEMS device, MEMS device module and acoustic transducer
MEMS devices and methods of manufacture thereof
MEMS devices with voltage driven flexible elements
MEMS element, MEMS device and MEMS element manufacturing method
MEMS having a three-wafer structure
MEMS hybrid structure having flipped silicon with external...
MEMS microphone
MEMS microphone module and method thereof
MEMS microphone package and method thereof
MEMS package and packaging method thereof
MEMS pressure sensor using area-change capacitive technique
MEMS resonator and method of enhancing an output signal...
MEMS scanning mirror with trenched surface and tapered comb...
MEMS sensor
MEMS sensor
MEMS sensor comprising a deformation-free back electrode
MEMS structure having a blocked-sacrificial layer...
MEMS structure support and release mechanism
MEMS structure with suspended microstructure that includes...
MEMS switch having hexsil beam and method of integrating...