MEMS sensor

Details MEMS sensor MEMS sensor

2009-06-16

2011-10-18

Pert, Evan (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S419000, C257S420000, C257SE21002, C257SE21704, C257SE29324, C438S053000, C381S174000, C381S176000

Reexamination Certificate

active

08039911

ABSTRACT:
The MEMS sensor according to the present invention includes a diaphragm. In the diaphragm, an angle formed by two straight lines connecting supporting portions and the center of a main portion with one another respectively is set to satisfy the relation of the following formula (1):in-line-formulae description="In-line Formulae" end="lead"?(A2/A1)/(B2/B1)≧1  (1)in-line-formulae description="In-line Formulae" end="tail"?A2: maximum vibrational amplitude of the diaphragm in a case of working a physical quantity of a prescribed value on the diaphragmA1: maximum vibrational amplitude of the diaphragm in a case of working the physical quantity on the diaphragm in an omitting structure obtained by omitting one of the supporting portions from the diaphragmB2: maximum stress caused in the diaphragm in the case of working the physical quantity on the diaphragmB1: maximum stress caused in the diaphragm in the case of working the physical quantity on the diaphragm in the omitting structure.

REFERENCES:
patent: 5242863 (1993-09-01), Xiang-Zheng et al.
patent: 5870482 (1999-02-01), Loeppert et al.
patent: 6465271 (2002-10-01), Ko et al.
patent: 6743654 (2004-06-01), Coffa et al.
patent: 7023066 (2006-04-01), Lee et al.
patent: 7144750 (2006-12-01), Ouellet et al.
patent: 7329933 (2008-02-01), Zhe et al.
patent: 7346178 (2008-03-01), Zhe et al.
patent: 2006/0233401 (2006-10-01), Wang
patent: 2007/0064968 (2007-03-01), Weigold
patent: 2007/0158826 (2007-07-01), Sakakibara et al.
patent: 2007/0190680 (2007-08-01), Fukuda et al.
patent: 2009/0208037 (2009-08-01), Zhe
patent: 2007-180201 (2007-07-01), None

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