Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2005-08-16
2005-08-16
Ngô, Ngân V. (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C257S417000
Reexamination Certificate
active
06930368
ABSTRACT:
A microelectromechanical system includes a first wafer, a second wafer including a moveable portion, and a third wafer. The movable portion is movable between the first wafer and the third wafer. The first wafer, the second wafer, and the third wafer are bonded together.
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Hartwell Peter G.
Hoen Storrs T.
Horsley David
Merchant Paul P.
Taussig Carl P.
Hewlett--Packard Development Company, L.P.
Ngo Ngan V.
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